发明名称 |
PRODUCTION OF ACETAL DERIVATIZED HYDROXYL AROMATIC POLYMERS AND THEIR USE IN RADIATION SENSITIVE FORMULATIONS |
摘要 |
<p>The present invention provides a process for generating mixed acetal polymers by reacting a hydroxyl containing polymer or monomer with vinyl ether and alcohol in the presence of an acid catalyst. The process of this invention provides a new class of polymers based on mixed acetals which are prepared in-situ with one reaction. The mixed acetal polymers are inexpensive to synthesize and readily reproducible. The resulting mixed acetal polymer is blended with a photoacid generator and dissolved in a solvent to produce a chemically amplified resist composition. A process for forming a pattern comprises the steps of providing the chemically amplified resist composition, coating a substrate with the resist composition, imagewise exposing the resist coated substrate to actinic radiation, and forming a resist image by developing the resist coated substrate.</p> |
申请公布号 |
EP1086156(B1) |
申请公布日期 |
2006.02.15 |
申请号 |
EP19990916667 |
申请日期 |
1999.04.14 |
申请人 |
ARCH SPECIALTY CHEMICALS, INC. |
发明人 |
MALIK, SANJAY;BLAKENEY, ANDREW, J.;FERREIRA, LAWRENCE;SIZENSKY, JOSEPH, J.;MAXWELL, BRIAN, E. |
分类号 |
C08F257/02;C08F8/00;C08F8/14;C08F12/24;C08F212/14;C08F261/02;C08F261/12;C08G8/14;C08G8/30;G03F7/004;G03F7/039;G03F7/30;G03F7/40 |
主分类号 |
C08F257/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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