摘要 |
A reservoir capacitor of a semiconductor device is provided to easily improve the capacitance of a reservoir capacitor without using an additional process by using a process of forming a semiconductor device in a cell region. A reservoir capacitor(230) is formed in a peripheral circuit region of a semiconductor substrate(100). The reservoir capacitor is a cylindrical capacitor. The reservoir capacitor includes a cylindrical lower electrode formed on the semiconductor substrate having a predetermined underlying structure, a dielectric layer(215) formed on the cylindrical lower electrode, and an upper electrode layer(225) formed on the dielectric layer.
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