| 摘要 |
Provided is a calibration method for an end portion inspecting device including a light emitting unit for irradiating the end portion of an object substrate with an inspection light, and a detection unit for detecting the optical characteristics of a reflected light reflected on the end portion of the object substrate. The calibration method detects a defect having occurred at the end portion of the object substrate, on the basis of the optical characteristics of the reflected light, which are detected by the detection unit. The calibration method is characterized by comprising a pseudo defect forming step of forming a plurality of pseudo defects, in which at least one of positions, shapes and sizes in a thickness direction is set different from each other, in the circumferential direction at the end portion of a calibration substrate or a reference, a detecting step of detecting the optical characteristics of the reflected light with the detection unit by irradiating each of the pseudo defects with the inspection light, and an adjusting step of calibrating the end portion inspecting device on the basis of the optical characteristics of the reflected light, which are individually detected from each of the pseudo defects.
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