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发明名称
ETCHING APPARATUS FOR SEMICONDUCTOR
摘要
申请公布号
KR20060014223(A)
申请公布日期
2006.02.15
申请号
KR20040062830
申请日期
2004.08.10
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JONG JUN
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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