发明名称 Positioning device with a solid-body joint
摘要 A positioning device has a first unit and a second unit arranged so as to be displaceable relative to the first unit. A slip-stick drive acts between the first unit and the second unit to produce a translatory movement (P) of the two units. The positioning device has a solid-body joint which is coupled to the first unit and the slip-stick drive and which mechanically protects a translation shaft of the slip-stick drive against rotation and/or lateral displacement.
申请公布号 US7579752(B2) 申请公布日期 2009.08.25
申请号 US20070000099 申请日期 2007.12.07
申请人 ATTOCUBE SYSTEMS AG 发明人 HAFT DIRK;LINDENBERG TOBIAS;BOEDEFELD CHRISTOPH
分类号 H01L41/09 主分类号 H01L41/09
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