发明名称 |
Non-contact technique to monitor surface stress |
摘要 |
A non-contact method for evaluating stress in a substrate. An impurity is non-uniformly introduced into at least one region of a crystalline substrate. The crystalline substrate is subjected to physical stress. Fluorescence producing energy is directed at the crystalline substrate. A fluorescence produced by the crystalline substrate is measured. The fluorescence is correlated with the stress on the crystalline substrate.
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申请公布号 |
US6997061(B2) |
申请公布日期 |
2006.02.14 |
申请号 |
US20040847044 |
申请日期 |
2004.05.17 |
申请人 |
THE JOHNS HOPKINS UNIVERSITY |
发明人 |
MIRAGLIOTTA JOSEPH A.;GROSSMAN KENNETH R.;FRAZER R. KELLY;BAMBERGER, JR. ROBERT J. |
分类号 |
G01L1/24;G01L5/00 |
主分类号 |
G01L1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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