| 摘要 |
A test head for a semiconductor integrated circuit tester, the test head includes a housing, a backplane structure attached to the housing in a manner permitting pivotal movement of the backplane structure relative to the housing, and a latch mechanism for forcing the backplane structure towards its closed position. The latch mechanism includes a cam follower that projects from the backplane structure in a direction perpendicular to the axis of pivotal movement of the backplane structure, a cam plate that is attached to the housing and is moveable relative to the housing and is formed with a cam slot for receiving the cam follower, and a drive mechanism effective to drive the cam plate to move relative to the housing. In the event that the cam follower is located in the working region of the cam slot, movement of the cam member in one direction urges the backplane structure towards the closed position and movement in the opposite direction urges the backplane structure away from the closed position.
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