发明名称 Double-gate structure fin-type transistor
摘要 A semiconductor device has a fin-type transistor formed in a projecting semiconductor region. The projecting semiconductor region is formed on a major surface of a semiconductor substrate of a first conductivity type. A gate electrode of the fin-type transistor is formed on at least opposed side surfaces of the projecting semiconductor region, with a gate insulating film interposed. Source and drain regions are formed in the projecting semiconductor region such that the source and drain regions sandwich the gate electrode. A channel region of the first conductivity type is formed in the projecting semiconductor region between the source and drain regions. The following relationship is establis
申请公布号 US6998676(B2) 申请公布日期 2006.02.14
申请号 US20030744756 申请日期 2003.12.23
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KONDO MASAKI;KATSUMATA RYOTA
分类号 H01L27/088;H01L29/76;H01L21/334;H01L21/336;H01L21/8234;H01L21/8242;H01L21/84;H01L27/02;H01L27/108;H01L27/12;H01L29/78;H01L29/786;H01L29/94 主分类号 H01L27/088
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