发明名称 |
Double-gate structure fin-type transistor |
摘要 |
A semiconductor device has a fin-type transistor formed in a projecting semiconductor region. The projecting semiconductor region is formed on a major surface of a semiconductor substrate of a first conductivity type. A gate electrode of the fin-type transistor is formed on at least opposed side surfaces of the projecting semiconductor region, with a gate insulating film interposed. Source and drain regions are formed in the projecting semiconductor region such that the source and drain regions sandwich the gate electrode. A channel region of the first conductivity type is formed in the projecting semiconductor region between the source and drain regions. The following relationship is establis
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申请公布号 |
US6998676(B2) |
申请公布日期 |
2006.02.14 |
申请号 |
US20030744756 |
申请日期 |
2003.12.23 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
KONDO MASAKI;KATSUMATA RYOTA |
分类号 |
H01L27/088;H01L29/76;H01L21/334;H01L21/336;H01L21/8234;H01L21/8242;H01L21/84;H01L27/02;H01L27/108;H01L27/12;H01L29/78;H01L29/786;H01L29/94 |
主分类号 |
H01L27/088 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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