发明名称 Methods of fabricating silicon on insulator substrates for use in semiconductor devices
摘要 Example methods of fabricating a silicon on insulator substrate are disclosed. One example method may include forming a plurality of trenches on a substrate, forming an insulation layer on the trenches, removing a portion of the insulation layer formed on the trenches to partially expose the substrate, and forming a silicon on insulator film in the substrate via the exposed portions of the substrate.
申请公布号 US6998324(B2) 申请公布日期 2006.02.14
申请号 US20030750251 申请日期 2003.12.31
申请人 DONGBU ANAM SEMICONDUCTOR, INC. 发明人 SEO YOUNG HUN
分类号 H01L21/762 主分类号 H01L21/762
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