Teaching Tool of Wafer handling Robot using I-Type Finger,申请号KR20030058812-传众专利搜索

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发明名称	Teaching Tool of Wafer handling Robot using I-Type Finger
摘要
申请公布号	KR100551451(B1)	申请公布日期	2006.02.14
申请号	KR20030058812	申请日期	2003.08.25
申请人		发明人
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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