发明名称 |
Apparatus and method for determining the performance of micromachined or microelectromechanical devices (MEMS) |
摘要 |
An apparatus for determining the performances of at least one micromachined or microelectromechanical device (MEMS device) intended to carry a high frequency signal having an intended working frequency is disclosed. The MEMS device comprises a capacitive structure with at least one movable part, able to move with a frequency. The apparatus comprises a voltage signal source, at least one voltage divider circuit arranged between the capacitive structure and the voltage signal source, and a detection unit for detecting and measuring the voltage at the outlet of the voltage divider. The detection unit provides a combined voltage signal of an actuation voltage able to act on the moveable part of the capacitive structure with an actuation frequency and of a measurement voltage having a measurement frequency lower than the intended working frequency.
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申请公布号 |
US6998851(B2) |
申请公布日期 |
2006.02.14 |
申请号 |
US20030448734 |
申请日期 |
2003.05.29 |
申请人 |
INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC) |
发明人 |
VAN SPENGEN WILLEM MERLIJN |
分类号 |
G01R31/08;G01R31/28;G01R31/327;H01H11/00 |
主分类号 |
G01R31/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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