发明名称 |
Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid |
摘要 |
A surface cleaning apparatus comprising a chamber, and a thermal transfer device. The chamber is capable of holding a semiconductor structure therein. The thermal transfer device is connected to the chamber. The thermal transfer device has a surface disposed inside the chamber for contacting the semiconducting structure and controlling a temperature of the semiconductor structure in contact with the surface. The thermal transfer device has a thermal control module connected to the surface for heating and cooling the surface to thermally cycle the surface. The thermal control module effects a substantially immediate thermal response of the surface when thermally recycling the surface.
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申请公布号 |
US6997197(B2) |
申请公布日期 |
2006.02.14 |
申请号 |
US20020318632 |
申请日期 |
2002.12.13 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
SIMONS JOHN P.;MCCULLOUGH KENNETH J.;MOREAU WAYNE M.;COTTE JOHN M.;POPE KEITH R.;TAFT CHARLES J.;GOLDFARB DARIO L. |
分类号 |
B08B7/00;H01L21/00 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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