Probe head, its assembly method and probe card

摘要

A slide unit is slid on a flat slide plane of a table to adjust the relative positions of a plurality of slide units along a direction parallel to the flat slide plane. Even if the slide unit moves together with a movable unit along the direction parallel to the flat slide plane, the relative positions of a plurality of movable units will not change along a direction vertical to the flat slide plane. By sliding the slide unit on the flat slide plane of the table and moving the movable unit along the direction vertical to a slide surface, the relative positions of a plurality of probes mounted on the movable units can be adjusted independently and separately along the directions parallel to and vertical to the flat slide plane.