Control of dissolved gas levels in deionized water

摘要

An embodiment of the invention is an apparatus having a cleaning tank 2 , a megasonic energy source 3 , and an intake pipe 6 where a membrane contactor 9 is coupled to the intake pipe 6 to change the concentration of nitrogen gas in the deionized water 8 contained in intake pipe 6 to a range between 5.4% to 54% of saturation. Another embodiment is a method of changing the concentration of nitrogen gas in deionized water 8 to a range between 5.4% to 54% of saturation.