Method of fabricating a micro-electromechanical actuator that includes drive circuitry

摘要

A method of fabricating a micro-electromechanical actuator includes the step of forming register, gate and drive transistor circuitry on a substrate such that a number of laterally extending traces define at least part of the drive transistor circuitry. A layer of sacrificial material is formed on the register, gate and drive transistor circuitry such that the configuration of the laterally extending traces is imparted to the sacrificial material. A heater layer of an actuator arm is formed on the layer of sacrificial material such that the heater layer defines a heating circuit and has a series of lateral corrugations as a result of the surface configuration of the sacrificial layer. A mechanical layer of the actuator arm is formed on the heater layer and the layer of sacrificial material is removed.