摘要 |
A particle size measuring apparatus includes a laser light source; a coherence reducing element for receiving laser light emitted by the laser light source, reducing coherence of the laser light and emitting the laser light whose coherence is reduced; a ring light forming section for converting the light emitted by the coherence reducing element into ring light; an internal reflection mirror for concentrating the ring light on a particle to be measured and illuminating the particle; an object lens for receiving scattered light from the illuminated particle inside the ring light; a photoreceptive element for receiving the scattered light through the object lens; and a calculating section for calculating a size of the particle from the intensity of the scattered light obtained by the photoreceptive element by using a monotone increasing function.
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