发明名称 СИСТЕМА ТОКОПРИЕМНИКА
摘要 FIELD: electric current collector system to apparatus for working substrates and (or) plates. ^ SUBSTANCE: current collector system includes working chamber restricted at least by two walls and at least by one heating electromagnet. System includes at least one current collecting member restricted by outer surface and made of electrically conducting material suitable for heating by electromagnetic induction. Current collecting member is hollow one. First part of outer surface of current collecting member is suitable for forming wall of working chamber. Second part of outer surface of current collecting member is suitable for arranging near heating electromagnet. ^ EFFECT: enhanced uniformity of working chamber heating. ^ 25 cl, 6 dwg
申请公布号 RU2005121523(A) 申请公布日期 2006.02.10
申请号 RU20050121523 申请日期 2002.12.10
申请人 ЕТК ЭПИТАКСИАЛ ТЕКНОЛОДЖИ СЕНТЕР СРЛ (IT) 发明人 МАККАЛЛИ Джиакомо Николао (IT);КОРДИНА Олле (US);ВАЛЕНТЕ Джианлука (IT);КРИППА Данило (IT);ПРЕТИ Франко (IT)
分类号 C23C16/46 主分类号 C23C16/46
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