发明名称 СПОСОБ ИЗГОТОВЛЕНИЯ ТОНКИХ МЕТАЛЛИЧЕСКИХ ПЛЕНОК
摘要 FIELD: coating materials. ^ SUBSTANCE: method comprises applying a noble metal layer on the plates made of monocrystalline silicon and separating the layer from the substrate. The monocrystalline silicon is oxidized before the applying of the film. The film is applied by physical or chemical settling. The film is separated from the substrate by complete or partial dissolving of the substrate in floating solution. On dissolving the substrate, the metallic film is set on the surface of the floating solution or set in the other liquid to provide complete elevation of the metallic film by the surface tension. ^ EFFECT: simplified method. ^ 4 cl, 7 ex
申请公布号 RU2004123083(A) 申请公布日期 2006.02.10
申请号 RU20040123083 申请日期 2004.07.28
申请人 Институт проблем технологии микроэлектроники и особочистых материалов Российской Академии Наук (ИПТМ РАН) (RU) 发明人 Старков Виталий Васильевич (RU);В ткин Анатолий Федорович (RU);Волков Владимир Тимофеевич (RU)
分类号 C23C14/22;C23C14/16 主分类号 C23C14/22
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