| 摘要 |
PROBLEM TO BE SOLVED: To restrict the consumption volume of a treatment liquid in a batch processing. SOLUTION: A substrate processing device is provided with a photosensor 200 for detecting whether to contain a substrate in a carrier cassette for each stage, two processing tubs 40a, 40b which perform the same processing simultaneously, and a supply mechanism 30 for supplying the treatment liquid independently to the processing tubs 40a, 40b, respectively. The substrate processing device detects the number N of substrates 90 in response to the detected result of the photosensor 200, and performs a processing to supply the treatment liquid only to the processing tub 40a if the number N is equal to or less than an allowable number of the processing tub 40a. COPYRIGHT: (C)2006,JPO&NCIPI
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