| 摘要 |
PROBLEM TO BE SOLVED: To remove an entrance of contaminants into fine holes upon filling a metal in the fine holes. SOLUTION: A board 1 (a) is used with the fine holes 5 open to one face 4, and the face 4 and the fine holes 5 have insulating properties on its one face and on its inner surface. The method for manufacturing the board with a filled metal portion comprises at least a first metal layer forming step (b) of forming a first metal layer 11 on the one face 4 of the board 1, and a second metal layer forming step (c) of filling a metal in the fine hole 5 to form a second metal layer 12 so as to cover the first metal layer 11. Further, the method may contain a patterning step (d) of providing a land 15 composed of the first metal layer 11 and the second metal layer 12 and/or a wiring part. COPYRIGHT: (C)2006,JPO&NCIPI
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