| 摘要 |
<P>PROBLEM TO BE SOLVED: To fine-adjust the arrangement of an optical element for adjustment with proper sensitivity. <P>SOLUTION: A method of adjusting an image-formation optical system comprises steps of irradiating a lighting light in a predetermined wavelength band to adjusting marks including plural first marks arranged at a first pitch, and plural second marks arranged at a second pitch different from the first pitch (S5, S6); capturing images, based on lights that have passed through an aperture stop and reached the image surface of an image-forming optical system out of diffraction lights produced from the adjusting marks (S5, S6); calculating the positional deviation amount between the first marks and the second marks, by coupling with the symmetry/asymmetry of brightness information concerning the first marks and the second marks out of brightness information on the images of the adjusting marks (S5, S6); changing the wavelength band of the lighting light (S5, S6); and fine-adjusting the optical element for adjustment, disposed between a pupil surface of the image-formation optical system and an aperture stop surface, based on the respective positional deviation amount, when the wavelength bands of the lighting light are different to correct an image-formation positional deviation of a pupil image at the aperture stop surface (S8, S9). <P>COPYRIGHT: (C)2006,JPO&NCIPI |
