摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laminated piezoelectric element easily deformed elastically and provided with an extraction electrode having a sufficient bonding strength, and to provide its manufacturing method. <P>SOLUTION: The laminated piezoelectric element 1 is provided with a ceramic laminate 10 constituted of a piezoelectric layers 20 consisting of a piezoelectric material and alternately laminated conductive internal electrode layers 21, 22, and the extraction electrode 34 connected to the side surfaces 101, 102 of the ceramic laminate 10 through a conductive adhesive agent 33. The extraction electrode 34 is provided with a mesh configuration having a multitude of through holes while a conductive bonding agent 33 is invaded into the through holes. The thickness of the conductive bonding agent 33 invaded into the through holes is smaller than that of the extraction electrode 34 in a region having an area more than 50% of total bonding surface between the extraction electrode 34 and the conductive bonding agent 33. <P>COPYRIGHT: (C)2006,JPO&NCIPI |