发明名称 MEMS CIRCUIT STRUCTURE AND METHOD
摘要 PROBLEM TO BE SOLVED: To provide a device having a sealed actuator chamber and a vent connected to the actuator chamber. SOLUTION: The vent connects the chamber to exterior atmosphere surrounding the device so as to equalize the pressure in the chamber. The vent has a size and form to allow pressure equalization to occur outside a normal operation cycle of the chamber and controls the pressure to prevent undesirable deflection of a membrane in the chamber and ensure the suitable operation of the device. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006035422(A) 申请公布日期 2006.02.09
申请号 JP20050219359 申请日期 2005.07.28
申请人 XEROX CORP 发明人 FEINBERG KATHLEEN A;GULVIN PETER M;JIA NANCY Y;NYSTROM PETER J
分类号 B81B3/00 主分类号 B81B3/00
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