| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS (micro electromechanical system) device which has vibration absorbing property within a much more wide frequency range. SOLUTION: In the MEMS device 10, the vibration absorbing property of a pair of comb teeth electrodes 28A, 28B is achieved by means of a vibration correcting means 36. Further, the vibration absorbing property of a pair of the comb teeth electrodes 28A, 28B is also achieved by means of a vibration absorbing material 18 attached to the bottom surface 12a of a casing 12. Therefore, the frequency range, within which the vibration of the MEMS device 10 can be absorbed, is widened, compared with the cases where the vibration correcting means 36 only is provided and the vibration absorbing material 18 only is provided, by slightly shifting the frequency range within which the vibration correcting means 36 absorbs the vibration and the frequency range within which the vibration absorbing material 18 absorbs the vibration, even if the shift is slight. As a result, the MEMS device 10 can absorb the vibration within the frequency range much more wider than those for the MEMS device having any one only of the vibration correcting means 36 and the vibration absorbing material 18. COPYRIGHT: (C)2006,JPO&NCIPI
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