| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an operation/display device to which a plurality of different kinds of jobs to execute like a chain. <P>SOLUTION: The different kinds of jobs such as exposure treatment and instrumentation treatment (alignment) by an exposure apparatus and calibrate treatments (calibration), calibration treatment (calibration) and adjusting treatment of the optical system of the exposure apparatus are simultaneously reserved and registered through a key board etc. and the state of the reservation registration is displayed on a job list display screen 50. The reserved and registered jobs are transferred to be executed like a chain, and disappears from the screen 50 when the execution is completed (the job is completed). On the screen 50, a job list display unit 51, a selected job detail display unit 52, a job selection button 53, a job state transition chart display unit 54, and a command panel operation part 55 are displayed simultaneously. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
