DEPOLARIZER, ILLUMINATION OPTICAL DEVICE, ADJUSTING METHOD OF ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE, AND MANUFACTURING METHOD OF MICRODEVICE

摘要

PROBLEM TO BE SOLVED: To provide a depolarizer capable of utilizing stress birefringence generated in an optical member.

SOLUTION: The depolarizer 3 for converting polarized incident light into substantially nonpolarized light includes at least two optical members 31, 33 arranged along an optical axis AX and a stress applying means 35 which applies a stress for at least one of the at least two optical members from a first direction and applies a stress for at least another one of the at least two optical members from a second direction different from the first direction.

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