| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-power consumption piezo-electric gyroscope which has a stable vibration property, high reliability, high detection sensitivity and high accuracy. <P>SOLUTION: In the piezo-electric gyroscope which is made up such that a piezo-electric thin film is formed on a tuning-fork type structure being made of silicon (Si) and having a substrate section and a plurality of vibration legs formed so as to project from the substrate, a V-shaped groove is formed on the vibration leg, and the piezo-electric thin film is formed on the slope of the V-shaped groove. A method for manufacturing the gyroscope comprises; preparing a Si wafer whose planar surface is in the (100) crystal plane; making up the V-shaped groove in the prescribed form by using a wet etching method; forming a mask layer in the outline form of the tuning-fork type structure after forming the piezo-electric thin film on the slope of the V-shaped groove; and carrying out a dry etching process by utilizing the mask layer as a mask. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
