BREATH FILTER FOR SEMICONDUCTOR WAFER STORAGE CONTAINER

摘要

PROBLEM TO BE SOLVED: To provide a breath filter to be used for a semiconductor wafer storage container for cleaning air in the semiconductor wafer storage container. SOLUTION: End rim part in one side of a cylindrical filter 7 formed by folding a sheet-like filtration material 4 in a corrugated shape is inserted in an installation recessed groove 19 of an outer frame 9 and the recessed groove 19 is filled with a seal resin 19a to firmly fix the filter 7 and the end rim part of the other end of the cylindrical filter 7 is inserted into an inversely recessed groove 22 of a cover member 10 and a circular air ventilation space 33 is kept between the outer frame 9 and the cylindrical filter 7 and the breath filter 1 is firmly joined to and fixed in a semiconductor wafer storage container 2 by a fixing ring 11. COPYRIGHT: (C)2006,JPO&NCIPI