| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of improving the storage efficiency of equipment in an equipment box. SOLUTION: The equipment box 4 is supported at its front-side lower end rotatably on a support shaft 5 extending nearly horizontally, and tilted toward the front on the support shaft 5 as a fulcrum to be drawn out of a frame 1. Wires such as signal lines for signal transmission and reception, feed lines for power supply, etc., are connected to respective pieces of equipment in the equipment box 4. The respective wires are arranged extending into the frame 1 through nearby the support shaft 5. Consequently, the respective wires need not be made unnecessarily long even in the constitution wherein the equipment box 4 is drawn out of the frame 1 to eliminate the need to secure a wide space for storing the wires. COPYRIGHT: (C)2006,JPO&NCIPI
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