发明名称 Microstructure and manufacturing process thereof
摘要 It is an object of the present invention to attain a microstructure having a miniature continuous structure which has high throughput and has been processed with high accuracy. To achieve this, provided is a microstructure having a column-shaped structure and a slit-forming portion which extends in a side-face direction from a side face of the column-shaped structure, wherein the slit-forming portion has a plurality of slits aligned in parallel at an interval from 20 to 1,000 nm in a direction along a center axis of the column-shaped structure.
申请公布号 US2006027290(A1) 申请公布日期 2006.02.09
申请号 US20050194695 申请日期 2005.08.02
申请人 NEC CORPORATION 发明人 IGUCHI NORIYUKI;NAKADA MASAFUMI;IIDA KAZUHIRO
分类号 C23C8/04 主分类号 C23C8/04
代理机构 代理人
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