发明名称 Design of BEOL patterns to reduce the stresses on structures below chip bondpads
摘要 A semiconductor structure comprising a substrate including a first layer comprising a first material having a first modulus of elasticity; a first structure comprising a conductor and formed within the substrate, the first structure having an upper surface; and a stress diverting structure proximate the first structure and within the first layer, the stress diverting structure providing a low mechanical stress region at the upper surface of the first structure when a physical load is applied to the first structure, wherein said low mechanical stress region comprises stress values below the stress values in areas not protected by the stress diverting structure. The stress diverting structure comprises a second material having a second modulus of elasticity less than the first modulus of elasticity, the second material selectively formed over the upper surface of the first structure for diverting mechanical stress created by the physical load applied to the first structure.
申请公布号 US2006027927(A1) 申请公布日期 2006.02.09
申请号 US20050220433 申请日期 2005.09.07
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 AWAD ELIE;AWAD MARIETTE A.;FENG KAI D.
分类号 H01L23/52 主分类号 H01L23/52
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