LARGE SUBSTRATE TEST SYSTEM

摘要

A method and system (100) for testing one or more large substrate (350) are provided. In one or more embodiments, the system (100) includes a testing chamber (400) having a substrate table (550) disposed therein. The substrate table (550) is adapted to move a substrate (350) within the testing chamber (400) in various directions. More particularly, the substrate table (550) includes a first stage (555) movable in a first direction, and a second stage (560) movable in a second direction, wherein each of the stages (555, 560) moves in an X-direction, Y-direction or both X and Y directions. The system (100) further includes a load lock chamber (200) at least partially disposed below the testing chamber (400), and a transfer chamber (300) coupled to the load lock chamber (200) and the testing chamber (400). In one or more embodiments, the transfer chamber (300) includes a robot (310) disposed therein which is adapted to transfer substrates (350) between the load lock chamber (200) and the testing chamber (400).