FAILSAFE SWITCHING OF INTELLIGENT CONTROLLER METHOD AND DEVICE
摘要
<p>The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.</p>
申请公布号
WO2006014888(A2)
申请公布日期
2006.02.09
申请号
WO2005US26375
申请日期
2005.07.25
申请人
MKS INSTRUMENTS, INC.;KHALIL, NIDAL;SIFNATSCH, GUENTER;LEV-AMI, UZI;HADAR, RON
发明人
KHALIL, NIDAL;SIFNATSCH, GUENTER;LEV-AMI, UZI;HADAR, RON
