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发明名称
SCHEIBENBESCHICHTUNGSSYSTEM
摘要
申请公布号
DE04703559(T1)
申请公布日期
2006.02.09
申请号
DE20040703559T
申请日期
2004.01.20
申请人
INTEVAC, INC.
发明人
FAIRBAIRN, P.;BLUCK, TERRY;MARION, CRAIG;WEISS, ROBERT E.
分类号
C23C14/00;C23C14/56;C23C16/458;C23C16/54;G11B5/84;H01L21/00
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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