| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a circuit device having improved positioning accuracy of a built-in circuit element, and to provide a manufacturing method thereof. <P>SOLUTION: The manufacturing method of the circuit device forms a first recognition pattern 20 and a second recognition pattern 21 for each circuit device. A circuit element 15 is settled by recognizing position information of a conductive pattern using the first recognition pattern 20. The position of the settled circuit element 15 is confirmed by using the second recognition pattern 21. Accordingly, the positional accuracy of the circuit element can be improved, by checking the allocating position using the recognition pattern different from that used for arrangement and then feeding back such positional information. Moreover, inclination of the first circuit element 15A can be controlled, to further improve the positional accuracy, by allocating the first circuit element 15A on the divided fine dummy pattern. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
