发明名称 PLASMA TREATMENT DEVICE AND METHOD, AND MANUFACTURING METHOD FOR FLAT PANEL DISPLAY APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To avoid a complicatedness and an enlargement of a device construction with an antenna array consisting of a plurality of wave guide slot antennas, whose opening is enlarged. <P>SOLUTION: A distributor 30 is equipped with a wave guide for feeding which extends in a direction of widths of the wave guide slot antennas 10A to 10H, and has openings 12 formed on a surface of a wall of the wave guide for feeding, through which wave guides for radiation having the wave guide slot antennas 10A to 10H communicate with the wave guide for feeding. Since the distributor 30 uses the wave guide for feeding of the length same as a summation of widths of the wave guides for radiation having the wave guide slot antennas 10A to 10H, the device construction is not complicated and enlarged even if the opening of the antenna array is enlarged by increasing a number of the wave guide slot antennas which constitute the antenna array. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006040609(A) 申请公布日期 2006.02.09
申请号 JP20040215564 申请日期 2004.07.23
申请人 GOTO NAOHISA;TOHOKU UNIV;TOKYO ELECTRON LTD 发明人 GOTO NAOHISA;OMI TADAHIRO;GOTO TETSUYA;MORIMOTO TAMOTSU
分类号 H05H1/46;C23C16/511 主分类号 H05H1/46
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