| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a sensor unit that is small and highly reliable, and to provide its manufacturing method that easily manufactures such a sensor unit. <P>SOLUTION: A sensor unit 11 has a protection material 31, a sensor housing module 21, and an active element housing module 41 in this order in a multi-stage state so that the sensor surface of the sensor housing module may face the protection material. The protection material has a protection substrate 32 and wiring 36, and the sensor housing module has a substrate 22, a sensor 23, and a plurality of front and back conductive vias 25 penetrating the substrate, and the front and back conductive vias are joined to the protection material's wiring as well, and the sensor is connected to the protection material's wiring. The active element housing module has a substrate 42, an active element 43, and a plurality of front and back conductive vias as well as having wiring 46 connecting the front and back conductive vias and the active element, and the front and back conductive vias are joined to the sensor housing module's front and back conductive vias. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
