| 摘要 |
PROBLEM TO BE SOLVED: To provide the coupler of an MEMS filter that is flexible in design, and can ignore the effect of a mass load. SOLUTION: A structure is provided with no effect of the mass load reflected in the characteristics of the MEMS filter by using a nano-size coupler, such as a carbon nanotube (Carbon Nanotube; CNT), that has an extremely smaller mass than a micro-size MEMS resonator for a connection section. COPYRIGHT: (C)2006,JPO&NCIPI |
