| 摘要 |
PROBLEM TO BE SOLVED: To detect an angular velocity around a plurality of axes with a high responsiveness. SOLUTION: A weight 40 is moving along with a circular orbit 41 in a circular motion which is carried out within an XY plane having an origin O under a supported status so that it might become movable with a predetermined flexibility in a case. At the moment when the weight 40 passes an X axis in a point Px, Coriolis force Fco of the weight 40 acting on a Z axis direction is detected. Then the angular velocityωx around the X axis is detected. At the moment when the weight 40 passes a Y axis at a point Py, the angular velocityωy around the Y axis is detected by detecting Coriolis force Fco of the weight 40 acting on the Z axis direction. By detecting the force acting on the weight 40 in the X axis direction at the point Px, the angular velocityωz around the Z axis is detected from Coriolis force which is determined by subtracting a centrifugal force from this force. A capacitance element is used for a drive and a force detection. COPYRIGHT: (C)2006,JPO&NCIPI
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