| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical measuring instrument capable of enhancing precision for detecting a stain of a protection glass. SOLUTION: Measured values Q<SB>90</SB>, Q<SB>50</SB>, Q<SB>10</SB>of a dimension of a measuring object are obtained respectively in threshold values 90%, 50%, 10%. A difference (i.e. displacement amount in the measured values) between the measured value Q<SB>90</SB>and the measured value Q<SB>50</SB>is judged as to whether the difference is a predetermined reference value or more or not. The stain exists in the protection glass in (b)-(d) in Fig. indicating the case of the reference value or more. No stain exists in the protection glass in (a) in Fig. indicating the case of having a value less than the reference value. Then, a difference between the measured value Q<SB>50</SB>and the measured value Q<SB>10</SB>is judged as to whether the difference is the predetermined reference value or more or not. The dense stain exists in the protection glass in (c) in Fig. indicating the case of the reference value or more. A buzzer is sounded therein and a red lamp is lit on, and an alarm is issued to an operator to remove the stain immediately. COPYRIGHT: (C)2006,JPO&NCIPI
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