发明名称 |
Apparatus for manufacturing silicon single crystal, method for manufacturing silicon single crystal, and silicon single crystal |
摘要 |
The apparatus for manufacturing a silicon single crystal includes: a crucible for storing molten silicon; a pulling-up device for pulling up a silicon single crystal from the molten silicon in the crucible to grow; a detecting device for detecting a position of the crucible in a vertical direction; and a control device for controlling a pulling rate for the silicon single crystal by the pulling-up device, based on the detected position of the crucible.
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申请公布号 |
US2006027160(A1) |
申请公布日期 |
2006.02.09 |
申请号 |
US20050192039 |
申请日期 |
2005.07.29 |
申请人 |
SUMIMOTO MITSUBISHI SILICON CORPORATION |
发明人 |
SUZUKI YOUJI;SATO SATOSHI |
分类号 |
C30B13/00 |
主分类号 |
C30B13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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