MOLD, MOLDED PIECE BY USING THE SAME, MANUFACTURING METHOD FOR SPUTTERING TARGET AND SPUTTERING TARGET

摘要

PROBLEM TO BE SOLVED: To provide a mold capable of obtaining a large sized molded piece free from breakage or cracks and excellent in shape accuracy using a cold isostatic press and without performing preforming, thereby to provide a sputtering target of high quality and at a low cost. SOLUTION: The mold for the cold isostatic press is constituted by a sheet material which does not become deformed even under pressurization by the cold isostatic press and a member having a structure which easily shrinks or becomes deformed during pressurization but does not generate repulsive force during decompression or by a member constituted by such a material. COPYRIGHT: (C)2006,JPO&NCIPI