发明名称 POLISHING SOLUTION RETAINER
摘要 <p>A substrate polishing apparatus and method are described. A base includes at least one movable platen to engage a polishing pad. At least one carrier head assembly presses a substrate against the polishing pad substantially within a polishing area during a polishing operation. A polishing solution dispenser applies a polishing solution to the polishing pad substantially within the polishing area during the polishing operation. A polishing solution retaining mechanism is attached to one of the base or the carrier head assembly. The retaining mechanism engages a top surface of the polishing pad and retains the polishing solution substantially within the polishing area during the polishing operation. Some implementations may reduce polishing solution consumption and allow for increased angular velocity.</p>
申请公布号 WO2006014728(A1) 申请公布日期 2006.02.09
申请号 WO2005US25733 申请日期 2005.07.19
申请人 APPLIED MATERIALS, INC.;ZHANG, HANZHONG;LIU, FENG, Q.;TSAI, STAN, D.;MAVLIEV, RASHID;OLGADO, DONALD;CHEN, LIANG-YUH 发明人 ZHANG, HANZHONG;LIU, FENG, Q.;TSAI, STAN, D.;MAVLIEV, RASHID;OLGADO, DONALD;CHEN, LIANG-YUH
分类号 (IPC1-7):B24B37/04;B24B57/02 主分类号 (IPC1-7):B24B37/04
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