PHOTO-REACTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a photo-reaction apparatus capable of inexpensively and speedily producing a micropattern.

SOLUTION: The photo-reaction apparatus 1 is equipped with: a LCD projector 3 which projects an image by irradiating a LCD panel displaying an input image with light; a sample mount stage 16 to mount a photo-reactive sample; a reduction projection lens 13 which reduces the projected light from the LCD projector 3 to image onto the sample; and a zoom adjusting mechanism 4 for adjusting a projection magnification of the image to be imaged onto the sample. The zoom adjusting mechanism 4 is composed of a first adjusting base 11 for adjusting the distance between the LCD panel and the reduction projection lens 13 and of a second adjusting base 12 for adjusting the distance between the reduction projection lens 13 and the sample.

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