发明名称 AIR CLEANER
摘要 <P>PROBLEM TO BE SOLVED: To provide an air cleaner permitting measurement of the concentration of a chemical ingredient contained in air during its operation. <P>SOLUTION: The cleaner has a chemical-removing filter making air pass through a diffusion scrubber so as to cause a chemical ingredient in the air to diffuse outside the scrubber for removal, a diffusion scrubber for measurement into which a part of air on the inlet or outlet side of the chemical-removing filter is introduced, an introduction tube letting an absorption liquid flow outside the the scrubber to cause the chemical ingredient diffused from the scrubber to be absorbed by the absorption liquid and a measuring instrument measuring the chemical ingredient contained in the absorption liquid within the introduction tube. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006035038(A) 申请公布日期 2006.02.09
申请号 JP20040216004 申请日期 2004.07.23
申请人 RENESAS TECHNOLOGY CORP 发明人 NAKANO TOSHINORI
分类号 B01D53/18;B01D46/00;B01D53/22;F24F7/00;G01N30/00;H01L21/02 主分类号 B01D53/18
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