| 摘要 |
PROBLEM TO BE SOLVED: To provide a shutter device which is provided with a position detecting function for a light shielding film without spoiling the feature of being thin. SOLUTION: The shutter device is provided with; a lower substrate 101 which is provided with a driving electrode 116 and has at least a part 114 corresponding to a shutter aperture, made to be light-transmissive; and a light shielding film 121 which is arranged on a surface provided with the driving electrode 116 of the lower substrate 101 and has conductivity partially and is run by electrostatic drive. In the shutter device, a common sensing electrode 117 and a full-opening sensing electrode 119, to which an AC voltage is applied, and an AC ammeter 136 for full-opening detection which detects currents flowing to the common sensing electrode 117 and the full-opening sensing electrode 119 are provided on the lower substrate 101. COPYRIGHT: (C)2006,JPO&NCIPI
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