| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a protection sheet for laser beam machining, which effectively suppresses the contamination on the surface of a workpiece, which is caused by decomposed products, when machining the workpiece by ultraviolet absorption ablation of a laser beam, and to provide a manufacturing method, which uses the protection sheet for laser beam machining and manufactures a laser beam-machined product. <P>SOLUTION: The protection sheet for laser beam machining is used when machining the workpiece by ultraviolet absorption ablation of a laser beam. The protection sheet includes at least an adhesive layer on a base material. The adhesive layer consists of an adhesive containing an aromatic hydrocarbon group-containing compound, and the etching rates (etching speed/energy fluence) of the base material and the adhesive layer are≥0.4 [(μm/pulse)/(J/cm<SP>2</SP>)] respectively. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
