MAGNETIC DETECTOR, METHOD OF MANUFACTURING THE SAME AND GEOMAGNETISM SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a magnetic detector that can be improved in magnetic flux converging efficiency, with respect to a small-sized galvanomagnetic transducer element, and to provide a geomagnetism sensor that uses the detector. SOLUTION: The magnetic detector is provided with a recess 7 formed into an SOI substrate 5 in the thickness direction from one surface of the substrate 5, a magnetic material 8 formed on the surface of the SOI substrate 5 in the recess 7, and another magnetic material 10 formed on the surface of the substrate 5 on the side opposite to the surface on which the recess 7 is formed. The detector is also provided with the galvanomagnetic transducer element 6 formed between the magnetic materials 8 and 10. The peripheral wall of the recess 7 is formed nearly perpendicular to the surface of the SOI substrate 5, on which the recess 7 is formed and the sensitivity region of the galvanomagnetic transducer element 6 is formed at a position crossing the extended line of the peripheral wall of the recess 7. COPYRIGHT: (C)2006,JPO&NCIPI