| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a porous silica-based thin film, by which the refractive index of the silica-based thin film to be formed can be controlled. SOLUTION: The method for producing the porous silica-based thin film having a controlled refractive index includes a process for forming the porous silica-based thin film by heat treating a thin film formed from a coating liquid containing an organic substance together with an alkoxysilane and/or an alkylalkoxysilane, under conditions that the organic substance evaporates or decomposes. The refractive index of the porous silica-based thin film is controlled by controlling the porosity of the porous silica-based thin film to be formed in the process. COPYRIGHT: (C)2006,JPO&NCIPI
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