| 摘要 |
PROBLEM TO BE SOLVED: To reduce generation of waste water and maintenance costs and wash with high efficiency and precision. SOLUTION: The first and the second washing are carried out in the first washing section 11 for rough washing using an electrolyte and the second washing section 12 for finish washing, respectively, by circulation use of the first and the second washing solution of specified water quality between the first washing solution tank 25 and the second washing solution tank 26 through a circulation system 65. The apparatus has the first purifier 27 and the second purifier 28, and the first washing solution contaminated increasingly is subjected to the first and second purification treatment to produce the second washing solution for finish washing, which is supplied to the second washing solution tank 26. COPYRIGHT: (C)2006,JPO&NCIPI
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